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Emmanuel Sicurani
Emmanuel Sicurani
STMicroelectronics
Ellipsometry
Analytical chemistry
Optoelectronics
Sputter deposition
Sputtering
2
Papers
11
Citations
0
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Silicide pre-clean effects on NiPtSi thermal stability for 65nm technologies and beyond
2007
Microelectronic Engineering
Susana Bonnetier
Bruno Imbert
Marco Hopstaken
D. Galpin
Romain Gwoziecki
David Barge
S. Zoll
Onder Anilturk
Emmanuel Sicurani
Christian Caillat
Alex Barr
Roberto Gonella
Yannick Espinoux
Pierre Mur
Nicolas Mayet
Andrea Gotti
M.T. Basso
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Citations (11)
Immersion lithography robustness for the C065 node
2006
Scott Warrick
Rob Morton
Andrea Mauri
Jean-Damien Chapon
Jerome Belledent
Will Conley
Alex Barr
Kevin Lucas
C. Monget
Valerie Plantier
David Cruau
Juan-Manuel Gomez
Emmanuel Sicurani
Jan-Willem Gemmink
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