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Shingo Kawachi
Shingo Kawachi
Thermal oxidation
Materials science
Semiconductor
Chemical engineering
MOSFET
7
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2
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0
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2024
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Theoretical study on interface orientation dependence of Si thermal oxidation based on Si emission model
2017
The Japan Society of Applied Physics
Takuya Nagura
Shingo Kawachi
Kenta Chokawa
Hiroki Shirakawa
Masaaki Araidai
Hiroyuki Kageshima
Tetsuo Endoh
Kenji Shiraishi
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Theoretical study on interface orientation dependence of Si thermal oxidation ofVertical-BC-MOSFET with compressive strain
2017
The Japan Society of Applied Physics
Shingo Kawachi
Hiroki Shirakawa
Kenta Chokawa
Masaaki Araidai
Hiroyuki Kageshima
Tetsuo Endoh
Kenji Shiraishi
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First-Principles Study on Hydrogen Annealing Effect in Si/SiO 2 Interface by Thermal Oxidation
2015
Shingo Kawachi
H. Hiroki
Masaaki Araidai
Hiroyuki Kageshima
Tetsuo Endoh
Kenji Shiraishi
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