Old Web
English
Sign In
Acemap
>
authorDetail
>
Zac Levinson
Zac Levinson
Synopsys
Environmental science
Optics
Flare
Extreme ultraviolet lithography
Process window
1
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Impact of flare on source mask optimization in EUVL for 7nm technology node
2020
Lisong Dong
Rui Chen
Taian Fan
Rongbo Zhao
Yayi Wei
Jianjun Jia
Zac Levinson
Thuc Dam
Jay Lee
Yongdong Wang
Lawrence S. Melvin
Show All
Source
Cite
Save
Citations (1)
1