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Rongbo Zhao
Rongbo Zhao
Chinese Academy of Sciences
Process window
Optics
Flare
Materials science
Extreme ultraviolet lithography
2
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3
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Impact of flare on source mask optimization in EUVL for 7nm technology node
2020
Lisong Dong
Rui Chen
Taian Fan
Rongbo Zhao
Yayi Wei
Jianjun Jia
Zac Levinson
Thuc Dam
Jay Lee
Yongdong Wang
Lawrence S. Melvin
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Impact of mask topography and flare on process window of EUV lithography
2019
Rongbo Zhao
Lisong Dong
Rui Chen
Yayi Wei
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Citations (2)
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