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Paul Chiang
Paul Chiang
United Microelectronics Corporation
X-ray lithography
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Immersion lithography
Lithography
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Optimization of multi-pole aperture for via patterning of 90 nm logic devices by KrF lithography
2005
Shu-Ping Fang
Hsiang Yang
Hsien-an Chang
Paul Chiang
Benjamin Sue-Min Lin
Kuei-Chun Hung
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