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J. Ubrig
J. Ubrig
Materials science
Plasma-enhanced chemical vapor deposition
Chemical vapor deposition
Chemical engineering
Plasma processing
4
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37
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Microbattery technology overview and associated multilayer encapsulation process
2009
Applied Surface Science
Raphael Salot
Steve W. Martin
Sami Oukassi
Messaoud Bedjaoui
J. Ubrig
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Citations (28)
HfO2-based solid solutions for high-k/metal gate stack properties improvement
2008
C. Dubourdieu
Virginie Brizé
J. Ubrig
S. Margueron
I. Matko
Erwan Rauwel
F. Ducroquet
Nevine Rochat
Andreas Klein
B. Hollander
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Interface phenomena in multilayers deposited by PECVD for encapsulation of lithium microbatteries
2008
J. Ubrig
Steve W. Martin
S. Cros
J.E. Bourée
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Citations (8)
Deposition of High Permeation Barrier Films by Plasma-Enhanced Chemical Vapor Deposition for Organic Solar Cells
2008
J. E. Bouree
S. Cros
Steve W. Martin
Messaoud Bedjaoui
J. Ubrig
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