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Sanchitha Fernando
Sanchitha Fernando
Agency for Science, Technology and Research
Microelectromechanical systems
Electronic engineering
Materials science
Electrode
Piezoelectricity
8
Papers
98
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AlN-on-SOI platform-based micro-machined hydrophone
2016
Applied Physics Letters
Jinghui Xu
Xiaolin Zhang
Sanchitha Fernando
Kevin T. C. Chai
Yuandong Gu
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Citations (22)
Aln-on-SOI platform-based MEMS hydrophone with ultra-low operation frequency and ultra-high noise resolution
2016
MEMS | International Conference on Micro Electro Mechanical Systems
Jinghui Xu
Xiaolin Zhang
Sanchitha Fernando
Srinivas Merugu
Kevin T. C. Chai
Alex Yuandong Gu
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Citations (2)
A monolithic 9 degree of freedom (DOF) capacitive inertial MEMS platform
2014
IEDM | International Electron Devices Meeting
Ilker Ender Ocak
Daw Don Cheam
Sanchitha Fernando
Angel T.H. Lin
Pushpapraj Singh
Jaibir Sharma
Geng L. Chua
Bangtao Chen
Alex Yuandong Gu
Navab Singh
Dim-Lee Kwong
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Citations (12)
Molybdenum etching using an SF6, BCl3 and Ar based recipe for high aspect ratio MEMS device fabrication
2013
Journal of Micromechanics and Microengineering
Jaibir Sharma
Sanchitha Fernando
W. Deng
Navab Singh
Wee Ming Tan
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Citations (8)
AlN Actuator for Tunable RFMEMS Capacitor
2011
Advanced Materials Research
Sanchitha Fernando
Tang Min
Lynn Khine
Rahul Agarwal
Kia Hian Lau
Jeffrey Bo Woon Soon
Ming Lin Julius Tsai
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Citations (2)
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