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Chenyu Wang
Chenyu Wang
Applied Materials
Materials science
Epitaxy
Analytical chemistry
Annealing (metallurgy)
Millisecond
4
Papers
2
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A Study of SiC:P Selective Epitaxial Growth by Uniform Experimental Design
2013
Yonggen He
Yong Chen
Guohui Cai
Youfeng He
Shaofeng Yu
Jingang Wu
David Wei Zhang
Chenyu Wang
Jiyue Tang
Ganming Zhao
Shiyuan Yang
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Extend Millisecond Anneal to Nickel Silicidation Process
2012
CSTIC | China Semiconductor Technology International Conference
Chenyu Wang
Ji Yue Tang
Ganming Zhao
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Process match between DSA and LSA for ultra-shallow junction formation
2012
IWJT | International Workshop on Junction Technology
Yonggen Hea
Bing Wu
Guobin Yu
Yong Chen
Hailong Liu
Wei Lu
Jingang Wu
David Wei Zhang
Chenyu Wang
Ji Yue Tang
Ganming Zhao
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Investigation of Intermittent Haze in 300mm SiGe Epitaxy Process and its Impact on PMOS Device Performance
2012
CSTIC | China Semiconductor Technology International Conference
Yonggen He
Youfeng He
Huojin Tu
Lan Jin
Jing Lin
Weizhong Xu
Tzu Chiang Yu
Wei Lu
Jinggang Wu
Chenyu Wang
Zhepeng Cong
Ji Yue Tang
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