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Marcello Ackermann
Marcello Ackermann
Stacking
Anodic bonding
Composite material
Wafer bonding
Materials science
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3D Stacking of Multiple Silicon Plates using Direct Wafer Bonding
2008
Ramses Günther
Marcello Ackermann
Rakesh Partapsing
Maximilien J. Collon
Kotska Wallace
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