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3D Stacking of Multiple Silicon Plates using Direct Wafer Bonding
3D Stacking of Multiple Silicon Plates using Direct Wafer Bonding
2008
Ramses Günther
Marcello Ackermann
Rakesh Partapsing
Maximilien J. Collon
Kotska Wallace
Keywords:
Stacking
Anodic bonding
Composite material
Wafer bonding
Materials science
Silicon
Optoelectronics
Correction
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