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Yuuki Kobayashi
Yuuki Kobayashi
Doping
Physics
Dopant
Analytical chemistry
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5
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11
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Microwave plasma doping: Arsenic activation and transport in germanium and silicon
2016
Japanese Journal of Applied Physics
Hidenori Miyoshi
Masahiro Oka
Hirokazu Ueda
Peter L. G. Ventzek
Yasuhiro Sugimoto
Yuuki Kobayashi
Genji Nakamura
Yoshihiro Hirota
Takanobu Kaitsuka
Satoru Kawakami
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Mechanisms for dose retention in conformal arsenic doping using a radial line slot antenna microwave plasma source
2015
Journal of Applied Physics
Hirokazu Ueda
Peter L. G. Ventzek
Masahiro Oka
Yuuki Kobayashi
Yasuhiro Sugimoto
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Microwave Plasma Doping: As Activation and Transport in Ge and Si
2015
Hidenori Miyoshi
Masahiro Oka
Yuuki Kobayashi
Hirokazu Ueda
Peter L. G. Ventzek
Yasuhiro Sugimoto
G.Nakamura
Yoshihiro Hirota
Takanobu Kaitsuka
Satoru Kawakami
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Appareil et procédé de dopage par plasma de gaz pulsé
2014
Peter L. G. Ventzek
Takenao Nemoto
Hirokazu Ueda
Yuuki Kobayashi
Masahiro Horigome
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Conformal doping of topographic silicon structures using a radial line slot antenna plasma source
2014
Journal of Applied Physics
Hirokazu Ueda
Peter L. G. Ventzek
Masahiro Oka
Masahiro Horigome
Yuuki Kobayashi
Yasuhiro Sugimoto
Toshihisa Nozawa
Satoru Kawakami
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Citations (7)
1