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Akio Kanamaru
Akio Kanamaru
Proximity effect (audio)
Computation
Distribution function
Electron-beam lithography
Error function
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Fast computation method for exposure intensity and pattern correction in electron‐beam lithography
1979
Journal of Vacuum Science and Technology
Atsushi Kikuchi
Akio Kanamaru
Nobumichi Okazaki
Yasuaki Nakane
Kunihiko Tsuboi
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