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Kun Li

Chartered Semiconductor Manufacturing

4

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Challenges in barrier and seed layers characterization of Cu technology IC devices

2006 IEEE Transactions on Device and Materials Reliability
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A comparative study of high resolution transmission electron microscopy, atomic force microscopy and infrared spectroscopy for GaN thin films grown on sapphire by metalorganic chemical vapor deposition

2006 Surface & Coatings Technology
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Enhanced Hot-Hole Induced Degradation of Strained p-Channel Metal Oxide Semiconductor Transistors in Complementary Metal Oxide Semiconductor Technology with 2.0 nm Gate Oxide

2005 Japanese Journal of Applied Physics
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Reduced Hot-Carrier Induced Degradation of NMOS I/O Transistors with Sub-micron Source-Drain Diffusion Length for 0.11 µm Dual Gate Oxide CMOS Technology

2005 Japanese Journal of Applied Physics
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