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Tang Ern Hui
Tang Ern Hui
National University of Singapore
High-κ dielectric
Dielectric
CMOS
Polysilicon depletion effect
Gate oxide
1
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11
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Development of plasma etching process for sub-50 nm TaN gate
2006
Thin Solid Films
Vladimir Bliznetsov
Rakesh Kumar
Lakshmi Kanta Bera
Loh Wei Yip
Anyan Du
Tang Ern Hui
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Citations (11)
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