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Serge Nicoleau
Serge Nicoleau
STMicroelectronics
Haze
Reticle
Wafer fabrication
Lithography
Critical dimension
1
Papers
4
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Reticle Haze: An Industrial Approach
2007
Stuart Gough
Xavier Gerard
Pascal Bichebois
A. Roche
Frank Sundermann
Veronique Guyader
Yann Bieron
Jean Galvier
Serge Nicoleau
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Citations (4)
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