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Vidyasagar Anantha
Vidyasagar Anantha
KLA-Tencor
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Extreme ultraviolet lithography
Lithography
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4
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7
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Missing Via Defect Capture Enhancement Using a Novel, High-Precision Array Segmentation Inspection Technique
2021
ASMC | Advanced Semiconductor Manufacturing Conference
Graham Jensen
Vidyasagar Anantha
Alexa Greer
Raghav Babulnath
Satya Kurada
Brad Austin
Shravan Matham
Alex Joseph Varghese
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High sensitivity repeater detection with broadband plasma optical wafer inspection for mask defect qualification
2020
Andrew Cross
Kaushik Sah
Dieter Van den Heuvel
Vidyasagar Anantha
Philippe Leray
Ramon Ynzunza
Raghav Babulnath
Neil Troy
Kenong Wu
Meghna Rajendran
Balarka Gupta
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EUV stochastic defect monitoring with advanced broadband optical wafer inspection and e-beam review systems
2018
Kaushik Sah
Andrew Cross
Martin Plihal
Vidyasagar Anantha
Raghav Babulnath
Derek Fung
Peter De Bisschop
Sandip Halder
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EUV reticle print verification with advanced broadband optical wafer inspection and e-Beam review systems
2017
Ravikumar Sanapala
Andrew Cross
Moshe E. Preil
Jin Qian
Shishir Suman
Vidyasagar Anantha
Kaushik Sah
Scott Eitapence
Danilo De Simone
Dieter Van den Heuvel
Philippe Foubert
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Citations (2)
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