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Ralf Scharnweber
Ralf Scharnweber
Facet (geometry)
Optics
Physics
Radiation
Critical illumination
2
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2024
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Mirror facets arrangement
2015
Joachim Hartjes
Sven Ulmer
Gerald Rothenhofer
Ralf Wichard
Steffen Fritzsche
Daniel Guhr
Ralf Scharnweber
Ulrich Müller
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Illumination optics for EUV microlithography and illumination system and projection exposure system with an illumination optics
2008
Martin Endres
Damian Fiolka
Jens Ossmann
Ralf Scharnweber
Christian Steigerwald
Ralf Stützle
Berndt Warm
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