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Norio Kagawa
Norio Kagawa
Mitsubishi
Gate oxide
Thin film
Stacking fault
Annealing (metallurgy)
Impurity
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2024
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Effect of Solidification Induced Defects in CZ- Silicon Upon Thin Gate Oxide Integrity
1993
Hisaaki Suga
Hidenobu Abe
Hiroshi Koya
Toshihiro Yoshimi
Isamu Suzuki
Hideo Yoshioka
Norio Kagawa
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