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Wei Ma

Hong Kong Applied Science and Technology Research Institute

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Towards high resolution pico-projector applications: Design improvements on MEMS scanning mirror

2011 NEMS | Nano/Micro Engineered and Molecular Systems
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Design optimization of MEMS 2D scanning mirrors with high resonant frequencies

2010 MEMS | International Conference on Micro Electro Mechanical Systems
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Design and fabrication of a MEMS scanning mirror with and without comb offset

2010 NEMS | Nano/Micro Engineered and Molecular Systems
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Méthode de liaison de piles de tranches en 3d à base de vias traversants le silicium

2008
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