Design optimization of MEMS 2D scanning mirrors with high resonant frequencies

An accurate and effective finite element method (FEM) based model for the MEMS electrostatically actuated 2D resonant scanning mirror is presently reported to analyze and predict the mirror's performance which has highly nonlinearity. The simulated transient responses of the mirror showed good matches with the experimental results. The hysteretic frequency response can also be predicted by the model with +/−10% deviation. Based on the derived model, an optimized mirror design, with elliptical-shaped mirror and extended combs, was implemented and characterized. A 51.1% increase of the scanning angle has been measured using the optimized design.