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P. Grabiec
P. Grabiec
Lawrence Berkeley National Laboratory
Sputtering
Highly charged ion
Atomic physics
Ion implantation
Ion
2
Papers
6
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Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation
2004
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
Thomas Schenkel
Ivo W. Rangelow
R. Keller
S.J. Park
Joakim Nilsson
A. Persaud
V. Radmilovic
P. Grabiec
D. H. Schneider
J.A. Liddle
Jeffrey Bokor
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Citations (6)
Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation
2003
Lawrence Berkeley National Laboratory
Thomas Schenkel
Ivo W. Rangelow
R. Keller
S.J. Park
Joakim Nilsson
A. Persaud
V. R. Radmilivitc
J.A. Liddle
P. Grabiec
Jeffrey Bokor
D.H. Schneider
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