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M. Nararoff
M. Nararoff
Reactive-ion etching
Cavity magnetron
Electric discharge
Plasma etching
Analytical chemistry
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Magnetron reactive ion etching of GaAs in a BCl3 discharge
1993
IVMC | International Vacuum Microelectronics Conference
G. F. McLane
M. Meyyappan
H. S. Lee
Melanie W. Cole
D. W. Eckart
R. T. Lareau
M. Nararoff
J. Sasserath
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