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Stefan Detterbeck
Stefan Detterbeck
Materials science
Inorganic chemistry
Photoresist
Wafer
Silicon nitride
4
Papers
9
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All-Wet Stripping of FEOL Photoresist Using Mixtures of Sulphuric Acid
2007
Solid State Phenomena
Enrico Bellandi
Mauro Alessandri
Stefan Detterbeck
Sally Ann Henry
Leo Archer
Thomas Hellweg
Michael Kagerer
Ladislaus Brilz
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Citations (4)
Single Wafer Tool Cleaning for Bi-layer Photoresist Rework - Stripper Development and Evaluation
2007
Aiping Wu
Eugene C. Baryschpolec
Les Molnar
Sally Ann Henry
Stefan Detterbeck
Ladislaus Brilz
Christin Bartsch
Georg Sulzer
Andreas Ott
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New Single Wafer Double Sided Spin Cleaning Method
2001
Solid State Phenomena
Walter Starflinger
Reinhard Sellmer
Stefan Detterbeck
Alfred Lechner
Jörg Leberzammer
Hans-Jürgen Dipl.-Ing. Kruwinus
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Etching Silicon Nitride and Silicon Oxide Using Ethylene Glycol / Hydrofluoric Acid Mixtures
1980
Alison Wood
Essex Junction
Stefan Detterbeck
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Citations (1)
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