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Sunny Stalnaker
Sunny Stalnaker
ASM International
Optics
Lithography
Materials science
Micrometre
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2
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13
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0.35-μm lithography using off-axis illumination
1993
Paul Frank Luehrmann
Peter van Oorschot
Hans Jasper
Sunny Stalnaker
Steve K. Brainerd
J. Brett Rolfson
Linard Karklin
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Citations (9)
Focal plane determination for sub-half micron optical steppers
1993
Microelectronic Engineering
Sunny Stalnaker
Paul Frank Luehrmann
Jacques Waelpoel
Craig B. Sager
Patrick Reynolds
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Citations (4)
1