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Hedong Yang
Hedong Yang
KLA-Tencor
Metrology
Standard deviation
Surface finish
Engineering
Resist
4
Papers
29
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UNIFIED NEURAL NETWORK FOR DEFECT DETECTION AND CLASSIFICATION
2019
Li He
Mohan Mahadevan
Sankar Venkataraman
Huajun Ying
Hedong Yang
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Spectral analysis of line width roughness and its application to immersion lithography
2006
Journal of Micro-nanolithography Mems and Moems
Gian Francesco Lorusso
Peter Leunissen
Monique Ercken
C. Delvaux
Frieda Van Roey
Nadia Vandenbroeck
Hedong Yang
Amir Azordegan
Tony DiBiase
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Citations (13)
Full spectral analysis of line width roughness
2005
L. H. A. Leunissen
G. F. Lorusso
M. Ercken
J. A. Croon
Hedong Yang
Amir Azordegan
Tony DiBiase
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Citations (16)
1