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Chang-Min Dai
Chang-Min Dai
TSMC
Electronic engineering
Phase-shift mask
Engineering
Phase (waves)
Resist
3
Papers
2
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Alt-PSM of Contact with Phase Assist Feature for 65-nm Node
2002
Jan-Wen You
Jaw-Jung Shin
Chung-Hsing Chang
Li-Wei Kung
Bin-Chang Chang
Chang-Min Dai
Tsai-Sheng Gau
Burn Jeng Lin
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Defect dispositioning using mask printability analysis on alternating phase-shifting masks
2002
Chung-Hsing Chang
Chen-Hao Hsieh
San-De Tzu
Chang-Min Dai
Burn Jeng Lin
Linyong Pang
Qi-De Qian
Jiunn-Hung Chen
Jason H. Huang
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Alternating phase shifting mask implementation to 0.1-μm logic gates
2002
Chung-Hsing Chang
San-De Tzu
Chen-Hao Hsieh
Chang-Min Dai
Burn Jeng Lin
Chia-Hui Lin
Hua-Yu Liu
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