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fumiko hida
fumiko hida
Polishing
Materials science
Oxide
Polymer
Oxidizing agent
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Polishing liquid for semiconductor substrate and method for polishing semiconductor substrate
2010
nomura yutaka
sigeru no bu
amano kura hitosi
oyama naoyuki
fumiko hida
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Polishing method of the metal-polishing liquid and the film to be polished
2006
nomura yutaka
yutaka nomura
nakagawa hirosi
hiroyuki nakagawa
sou anzai
fumiko hida
takesi sakurada
katumi mabuti
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