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Shirakawa Michihiro
Shirakawa Michihiro
Materials science
Polymer chemistry
Chemistry
Fabrication
tone
4
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パターン形成方法、電子デバイスの製造方法、感活性光線性又は感放射線性樹脂組成物、及び、レジスト膜
2018
Nishio Ryo
nisio akira
Takada Akira
Goto Akiyoshi
gotou ken yu
Shirakawa Michihiro
sirakawa sanzen kou
Tango Naohiro
tango tyoku kou
Marumo Kazuhiro
marumo kazuhiro
Sakita Kyohei
sakita kyouhei
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COMPOSITION DE RÉSINE SENSIBLE AU RAYONNEMENT OU SENSIBLE À LA LUMIÈRE ACTIVE, FILM PHOTORÉSISTANT, PROCÉDÉ DE FORMATION DE MOTIFS ET PROCÉDÉ DE FABRICATION DE DISPOSITIF ÉLECTRONIQUE
2017
Nishio Ryo
nisio akira
Kojima Masafumi
kozima masasi
Goto Akiyoshi
gotou ken yu
Tsuchimura Tomotaka
tuti mura tomotaka
Shirakawa Michihiro
sirakawa sanzen kou
Kato Keita
katou keita
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Advanced patterning approaches based on negative tone development (NTD) process for further extension of 193 nm immersion lithography
2015
Shirakawa Michihiro
Naoki Inoue
Furutani Hajime
Kei Yamamoto
Goto Akiyoshi
Mitsuhiro Fujita
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パターン形成方法、感活性光線性又は感放射線性樹脂組成物、レジスト膜、電子デバイスの製造方法、電子デバイス、及び、化合物
2014
Kataoka Shohei
syouhei kataoka
Akinori Shibuya
myouki sibuya
Toshiaki Fukuhara
tosiaki fukuhara
Furuya So
sou furuya
Shirakawa Michihiro
sanzen kou sirakawa
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