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G. Murphy
G. Murphy
IBM
Lithography
Photolithography
Electronic engineering
Dram
X-ray lithography
3
Papers
1
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0
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valuation of X-ray L raphy using a 0.175 pm (0.245 p DRAM Technology
1998
R. Longo
S. Chalowc
Alek C. Chen
Azalia A. Krasnoperova
Sungjae Lee
G. Murphy
Alan C. Thomas
M. Weybright
Gary B. Bronner
Ibm Semiconductor
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An evaluation of X-ray lithography using a 0.175 /spl mu/m (0.245 /spl mu/m/sup 2/ cell area) 1 Gb DRAM technology
1998
VLSIT | Symposium on VLSI Technology
R. Longo
S. Chaloux
Alek C. Chen
Azalia A. Krasnoperova
Sungjae Lee
G. Murphy
Alan C. Thomas
Chet Wasik
M. Weybright
Gary B. Bronner
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X ray fills the gap
1998
Chet Wasik
G. Murphy
Alek C. Chen
Azalia A. Krasnoperova
Alex L. Flamholz
Daniel J. DeMay
Jeffrey A. Leavey
Steve Loh
Sue Chaloux
Alan C. Thomas
Sang Lee
Kenneth J. Giewont
P. Agnello
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