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Juhyoung Moon
Juhyoung Moon
X-ray lithography
SU-8 photoresist
Photolithography
Metallizing
Photoresist
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Investigation of mechanism of pattern deformation on TiN substrate and O2 plasma effect without BARC
2008
Proceedings of SPIE
Juhyoung Moon
Young-Je Yun
Taek Seung Yang
Kwangseon Choi
Jeahee Kim
Jaewon Han
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