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Sang Soo Park
Sang Soo Park
SK Hynix
Materials science
Flux
Plasma etching
Polymer
Fluorocarbon
2
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Analytical study of polymer deposition distribution for two-dimensional trench sidewall in low-k fluorocarbon plasma etching process
2018
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Sun Woo Kim
Hwan Jun Zang
June Park
Gwang Sik Kim
Hyun-Yong Yu
Minwoo Ha
Kyung-Bo Ko
Sang Soo Park
Choon Hwan Kim
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Characterization of Grobal and Local Wafer Shape Change along Through Silicon Via Process Steps
2012
Chang Hwan Lee
Seok Ho Jie
Sang Soo Park
Hyung Won Yoo
Il Keoun Han
Woo Sik Yoo
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