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Sangjin Choi
Sangjin Choi
Samsung
Optoelectronics
Aspect ratio (aeronautics)
Engineering
Thin film
Computer network
4
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4
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Study on defect reduction for high aspect ratio etch process
2017
MIPRO | International Convention on Information and Communication Technology, Electronics and Microelectronics
Jinseok Lee
Myoungwoon Kim
Jae Bong Lee
Jiho Uh
Sangjin Choi
Taeyang Yoon
Kyuchul Shim
Kyoung-Soo Lee
Hoosub Cheon
Taekyun Kang
Han Seo Ko
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Citations (2)
A study on film thickness control of vertical flow showerhead reactor for RF plasma deposition
2017
MIPRO | International Convention on Information and Communication Technology, Electronics and Microelectronics
Guensuk Lee
Suhong Kim
Seunghyun Seok
Junsung Lee
Jin-Seok Lee
Sangjin Choi
Taeyang Yoon
Juhwan Park
Han Seo Ko
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A study on film thickness control of vertical flow showerhead reactor for RF plasma deposition
2017
ASMC | Advanced Semiconductor Manufacturing Conference
Guensuk Lee
Suhong Kim
Seunghyun Seok
Junsung Lee
Jin-Seok Lee
Sangjin Choi
Taeyang Yoon
Juhwan Park
Han Seo Ko
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