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Fred Van Roosmalen
Fred Van Roosmalen
Oxide
Thermal
Dry etching
Crystal growth
Thin film
1
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8
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Effect of Dry Etching of a Thermal Oxide on Subsequent Growth and Properties of Thin Oxides (≃ 80 Å)
1986
Journal of The Electrochemical Society
Anjan Bhattacharyya
Thijs Bril
Charles Johan Vorst
Barbara Westlund
Fred Van Roosmalen
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Citations (8)
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