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Effect of Dry Etching of a Thermal Oxide on Subsequent Growth and Properties of Thin Oxides (≃ 80 Å)
Effect of Dry Etching of a Thermal Oxide on Subsequent Growth and Properties of Thin Oxides (≃ 80 Å)
1986
Anjan Bhattacharyya
Thijs Bril
Charles Johan Vorst
Barbara Westlund
Fred Van Roosmalen
Keywords:
Oxide
Thermal
Dry etching
Crystal growth
Thin film
Breakdown voltage
Plasma etching
Inorganic chemistry
Chemistry
thermal oxide
Correction
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