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A. Kajiya

Mitsubishi Electric

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Impact of boron penetration from S/D-extension on gate-oxide reliability for 65-nm node CMOS and beyond

2004 VLSIT | Symposium on VLSI Technology
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Sub-1 /spl mu/m/sup 2/ high density embedded SRAM technologies for 100 nm generation SOC and beyond

2002 VLSIT | Symposium on VLSI Technology
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