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Masaki Saitoh
Masaki Saitoh
Tokai University
Thin film
Amorphous silicon
Schottky barrier
Sputtering
Annealing (metallurgy)
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Electrical characteristics of metal contacts on the surfaces of a-Si:H films annealed at low temperature
1990
Applied Surface Science
Yasuo Gekka
Masaki Saitoh
Kohji Ohga
Yosinori Akaida
Makio Akimoto
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