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Hikari Sugita
Hikari Sugita
Polymer
Structural unit
Inorganic chemistry
Stereochemistry
Materials science
2
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2024
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Resist underlayer film composition
2005
Hikari Sugita
Junichi Takahashi
Masato Tanaka
hikari sugita
masahito tanaka
jun'iti takahasi
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ビニル系ナフタレン誘導体の応用プロセス、ビニル系ナフタレン誘導体の製造方法、ビニル系ナフタレン誘導体の重合体、反射防止膜形成組成物および反射防止膜
2003
Keiji Konno
Isao Nishimura
Nakaatsu Nomura
Tsutomu Shimokawa
Hikari Sugita
Masato Tanaka
tutomu simokawa
keizi konno
hikari sugita
masahito tanaka
naka atusi nomura
kou nisimura
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