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Robert W. Pasco
Robert W. Pasco
Ceramic
Polishing
Substrate (chemistry)
Reactive-ion etching
Isotropic etching
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Chemical/mechanical polishing method for electronic part substrate
1990
Jeffrey William Carr
Lawrence Daniel David
William L. Guthrie
Frank B. Kaufman
Anton Nenadic
Robert W. Pasco
William John Patrick
Kenneth P. Rodbell
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