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William L. Guthrie
William L. Guthrie
Metal
Chemical-mechanical planarization
Chemistry
Inorganic chemistry
Materials science
6
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637
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0.09
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Method for laser-planarizing metallic thin film
1995
William L. Guthrie
Naftali E. Lustig
uiriamu rezurii gasurii
nafutari eriafu rusuteihi
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Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects
1991
Journal of The Electrochemical Society
Frank B. Kaufman
David B. Thompson
R. E. Broadie
Mark Anthony Jaso
William L. Guthrie
Dale Jonathan Pearson
M. B. Small
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Chemical/mechanical polishing method for electronic part substrate
1990
Jeffrey William Carr
Lawrence Daniel David
William L. Guthrie
Frank B. Kaufman
Anton Nenadic
Robert W. Pasco
William John Patrick
Kenneth P. Rodbell
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Methode de polissage chimico-mecanique pour la production de depots coplanaires metal/isolant sur un substrat
1986
Klaus Dietrich Beyer
William L. Guthrie
Stanley R. Makarewicz
Eric Mendel
William John Patrick
Kathleen Alice Perry
William Aaron Pliskin
Jacob Riseman
Paul M. Schaible
Charles Lambert Standley
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