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Makoto Muto
Makoto Muto
Dry etching
Etching
Photomask
Materials science
Optics
5
Papers
1
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0
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1900~2024
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2024
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Dry etching technologies for Cr film
2018
Kei Hattori
Takashi Miyamoto
Yoshinori Iino
Shunpei Kodama
Yoshie Okamoto
Kazuki Nakazawa
Makoto Karyu
Hideaki Terakado
Hiroki Shirahama
Hirotsugu Ita
Tomoaki Yoshimori
Hidehito Azumano
Makoto Muto
Mumenori Iwami
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Verfahren zum Ätzen einer Metallschicht
1997
Kei Hattori
Masaru Zama Kasai
Akira Kobayashi
Makoto Muto
Mikio Nonaka
Toshiyasu Onoda
Tomoaki Yoshimori
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