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Jason R. Carlesi
Jason R. Carlesi
Cymer, Inc.
Photolithography
Laser
Lithography
Throughput
Electronic engineering
2
Papers
2
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Systeme de suivi de procede pour lasers de lithographie
2001
Parthiv S. Patel
Joseph E. Conway
Muljadi Tantra
Jeffrey W. Moen
Jason R. Carlesi
Roger L. Green
Tom A. Watson
Christopher G. Rowan
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Extending the performance of KrF laser for microlithography by using novel F2 control technology
2000
Paolo Zambon
Mengxiong Gong
Jason R. Carlesi
Gunasiri G. Padmabandu
Mike Binder
Ken Swanson
Palash P. Das
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