Simulation and verification of a piezoelectrically actuated diaphragm for check valve micropump design
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Diaphragm (acoustics)
Check valve
Diaphragm pump
In this paper,a new umbrella valve diaphragm and the valve diaphragm in the structure of traditional features,applications in areas such as contrast effects,indicating that the new valve diaphragm seal structure can be applied to achieve good results,can replace traditional valve diaphragm.
Diaphragm (acoustics)
Diaphragm pump
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This paper describes a piezoelectric micropump built on a dome-shaped diaphragm with one-way parylene valves. The micropump uses piezoelectric ZnO film (less than 10 /spl mu/m thick) to actuate a parylene dome diaphragm, which is fabricated with an innovative, IC-compatible process on a silicon substrate. Piezoelectric ZnO film is sputter-deposited on a parylene dome diaphragm with its C-axis oriented perpendicular to the dome surface. Two one-way check valves (made of parylene) are integrated with a piezoelectrically actuated dome diaphragm to form a multi-chip micropump. The fabricated micropump (10/spl times/10/spl times/1.6 mm/sup 3/) consumes extremely low power (i.e., 3 mW to pump 3.2 /spl mu/L/min) and shows negligible leak up to 700 Pa static differential pressure.
Diaphragm (acoustics)
Parylene
Dome (geology)
Diaphragm pump
Molding (decorative)
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A novel high-output resonance-driven piezoelectric micropump using two active check valves in place of conventional passive check valves used in inlet and outlet is proposed. It actively controls opening/closing of check valves using piezoelectric actuator synchronizing with expansion/contraction of pump chamber. A prototype micropump is fabricated with an effective size of 17×8×1mm 3 . When tap water is used as the working fluid, pumping characteristics of the fabricated pump are experimentally investigated using an adequate timing control for valve opening/closing. From experimental results, it is ascertained that optimal values of the phase shift for the voltage to drive the pump chamber to realize a miniaturized but powerful micropump are 15° in inlet check valve and 195° in outlet. Based on obtained results, a sheet active shuttle valve that has a unified valve body for inlet and outlet check valves is newly proposed. A micropump with an effective size of 10×10×10mm 3 is fabricated and the basic characteristics are experimentally investigated.
Check valve
Synchronizing
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Diaphragm (acoustics)
Diaphragm pump
Enclosure
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Check valve
Diaphragm (acoustics)
Back pressure
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Electrostatic actuation method is commonly employed for MEMS micropump mechanism which consists of diaphragm microstructure and parallel electrode. This work discussed on design and simulation of square silicon diaphragms and it characteristics for micropump application which supply voltage range of 0V-20 V. The characterizations of these diaphragms were based on the measurement on parameters such as diaphragm displacement as function of voltage applied and stress distribution. The simulations were carried out using CoventorWare2007. Results show that simulation deviate theoretical value in a range of below 15%. The displacement of the diaphragm was proportional to the physical geometry of the diaphragm. Pull-in voltage defines the limitation value for micropump operation.
Diaphragm (acoustics)
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A distributing cracked diaphragm autoalarm system was developed for diaphragm pump.In the system,lower computer was used to detect whether the diaphragm in the diaphragm-cavity was broke down,upper computer was used to show the work state plan of the diaphragm,the specific location of the diaphragm breakdown which had a variety of management functions.The system is reliable,low cost,strong features and productivity is improved.
Diaphragm (acoustics)
Diaphragm pump
Realization (probability)
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Based on the multi-chamber series structure, a piezoelectric micropump with high output performance is proposed in this paper. The proposed micropump is composed of the circular unimorph piezoelectric vibrator, the cantilever check valve, and the pump body. First, the working process of the piezoelectric micropump was analyzed in detail. Then, the effect of the key dimension parameters on the output performance of the micropump was explored. The key dimension parameters mainly refer to the height of the pump chamber and valve opening (the deformation size of the valve). Finally, experimental prototypes with different parameters were fabricated for the evaluation of the output performance of the micropump. The experimental results show that when the pump chamber height is 0.1 mm and the valve opening is 0.4 mm, the piezoelectric micropump has a good comprehensive output performance. In particular, at 170 V and 120 Hz, the maximum flow rate of the dual-chamber series pump is 65.5 mL/min, and at 100 Hz, the maximum output pressure reaches 59.1 kPa. Moreover, at a certain voltage of 170 V, when the drive frequency is 450 Hz and 550 Hz, the output flow rate and pressure of the four-chamber series pump reach a maximum of 110 mL/min and exceed 140 kPa, respectively. In addition, the volumes of the proposed single-chamber, dual-chamber series, and four-chamber series micropumps are 22 mm × 22 mm × 5 mm, 32.6 mm × 22 mm × 5 mm, and 53.8 mm × 22 mm × 5 mm, respectively. The proposed piezoelectric micropump has the advantages of simple structure, low cost, miniaturization, and high output performance, thus gaining potential practicality for biomedical applications, cooling systems, fuel supply, chemical applications, etc.
Check valve
Unimorph
Vibrator (electronic)
Chamber pressure
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원자력발전소에서는 설비신뢰도 확보를 위해 기능적중요도결정(FID, Functional Importance Determination)을 활용하여 예방정비를 수행하고 있다. 또한 운영개선프로그램(CAP, Corrective Action Program)을 통해 운영 중 발생될 수 있는 설비의 문제점 및 개선 필요사항에 대해 설비이상 통지를 발행하고 그에 따른 시정조치를 수행해오고 있다. 본 논문에서는 OPR1000형 원자력발전소에서 발행된 설비이상통지(M2)를 분석하여 펌프 및 밸브유형별로 발행이력과 고장률을 평가하였다. 설비유형별 수량 대비 통지발행 비율은 설비등급과 무관하게 유사한 수준의 통지가 발행되었으며 대부분 일반통지로 발행되었다. 전체 발행된 통지 중에서 약 12% 수준만 설비에 실제 고장이 발생하여 발행되었으며, 반면 88%는 실제 고장으로 진전되기 전에 발견하여 고장을 방지하기 위해 발행된 것으로 분석되었다. 펌프유형 중에서는 PPVT(PUMP VERTICAL, 수직펌프)와 PPPD(PUMP POSITIVE DISPLACEMENT, 용적식펌프)가 상대적으로 고장률이 높게 평가 되었다. 밸브 중에서는 상대적으로 VVAD(VALVE AIR OPERATED DIAPHRAGM, 다이아프램식 공기구동밸브), VVAP(VALVE AIR OPERATED PISTON, 피스톤식 공기구동밸브), VVHC(VALVE HYDRAULIC CYLINDER, 유압실린더 밸브) 및 VVMO(VALVE MOTOR OPERATED, 모터구동밸브)의 고장률이 높게 나타났다. 이러한 경향은 미국 원전의 설비유형별 고장률과 비교할 때 유사한 수준이다.
Check valve
Axial piston pump
Valve timing
Piston (optics)
Diaphragm (acoustics)
Diaphragm pump
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Diaphragm (acoustics)
Check valve
Diaphragm pump
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Citations (32)