<title>Simultaneous measurement of the root-mean-square roughness and autocorrelation length by optical method</title>
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We developed an on-line measurement system for the simultaneous measurement of the root-mean-square roughness and autocorrelation length which are the parameters of surface roughness. The measurement is based on the scattering theory of light on the rough surface. Computer simulation shows that the measurement range depends on the wavelength of the light source, and this is verified with the experiment. We installed the measurement system at the finishing line of a cold-rolling steel work, and measured the two parameters in situ. The rms roughness and autocorrelation length are measured and transformed in the average surface roughness and then umber of peaks per inch, respectively. The measured data for both of the parameters are compared with those of stylus method, an the optical method is well coincided with the conventional stylus method.Keywords:
Stylus
Root mean square
Length measurement
Line (geometry)
When we measure three-dimensional surface roughness, higher skill is demanded to locate the specimen surface within a range of profilometer. From this need, the authors developed the three-dimensional profilometer to measure micro irregularities of surface by applying a commercial stylus profilometer. The developed system was controlled automatically the orientation of specimen table by the micro-computer. This computer calculates the inclinations of table in X- and Y-directions and the height to keep the diamond stylus in a measuring range. The height was corrected in an accuracy of 0.1μm and the inclination of table in about 0.02μm/mm.
Stylus
Table (database)
Measuring instrument
Surface Metrology
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This paper describes some of the design aspects of a prototype high-speed stylus profilometer intended primarily for rapid 3D measurement of small surface areas.
Stylus
Surface Metrology
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Stylus surface profiling instruments have found application in the characterization of microroughness. Al-Jumaily [1] has compared data obtained using a stylus profilometer and an optical scatterometer to characterize a metal surface. The stylus profilometer data was found to be inconsistent with the optical data. In resolving the discrepancy, the "transfer functions" of the instruments were identified as the source of the disagreement.
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The goal of the work, described in this paper, was to examine and analyse measurement capabilities of GUM Length and Angle Department in measurements of step height/depth standards with the values below 1 μm (nanostandards), with 2D, and 3D surface characteristics. Measurements were performed with microinterforometer and stylus profilometer. Keywords: nanometrology, depth/height standards, microinterferometry, contact profilometry.
Stylus
Nanometrology
Surface Metrology
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Currently the measurement of surface texture in mechanical engineering is traditionally carried out using profilometers. Modern profilometers do not allow measuring of surfaces with complex shapes. This is due to the different sensitivity of the sensor and the discreteness of the movements along the axes of the Cartesian coordinate system. Coordinate Measuring Machines are devoid of such a drawback. However, stylus of the coordinate measuring machine has a diameter many times larger than the diamond stylus of the profilometer. Therefore, there is a mechanical filtering effect, that affects the results of measuring the parameters of the surface texture. In this paper a mathematical model of the contact of the spherical stylus and a rough surface based on analytical geometry is proposed. Influence of the diameter of the spherical stylus on the maximum measurement errors of a amplitude parameters are investigated. Seven amplitude parameters Rp, Rv, Rz, Ra, Rq, Rsk, Rku of the surface texture are modeled. Coordinate measuring machine and profilometer with stylus diameter of 2 μm measurement results are compared. it was concluded that the stylus diameter of the coordinate measuring machine when measuring the surface texture should be no more than 20 μm.
Stylus
Coordinate-measuring machine
Texture (cosmology)
Surface Metrology
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We developed an on-line measurement system for the simultaneous measurement of the root-mean-square roughness and autocorrelation length which are the parameters of surface roughness. The measurement is based on the scattering theory of light on the rough surface. Computer simulation shows that the measurement range depends on the wavelength of the light source, and this is verified with the experiment. We installed the measurement system at the finishing line of a cold-rolling steel work, and measured the two parameters in situ. The rms roughness and autocorrelation length are measured and transformed in the average surface roughness and then umber of peaks per inch, respectively. The measured data for both of the parameters are compared with those of stylus method, an the optical method is well coincided with the conventional stylus method.
Stylus
Root mean square
Length measurement
Line (geometry)
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Citations (2)
Three-dimensional or x-y-z stylus profilometers are a well-established method for measuring non-rotationally symmetric aspheric surfaces. 1 In this paper, the design of a three-dimensional stylus profilometer that uses an optical reference surface is presented. The benefits of using this reference structure are also discussed.
Stylus
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Stylus
Nanometre
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The frequency response characteristics of a mechanical surface profilometer were examined. The treatment was based on a computational model that tracks the motion of a spherical stylus as it traces a mathematically defined surface. The stylus was found to possess a nonlinear response to the surface profile. The effects of the nonlinearity on the frequency response and spatial frequency bandwidth of the stylus profilometer were examined. The model assumes that no external force acts on the stylus; therefore, effects such as surface deformation were not investigated.
Stylus
Spatial frequency
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Paper presents methods and indexes of evaluation of road surfaces texture. Measurements of the texture depth (HP), the friction coefficient ^i, the mean profile depth (MPD) and the tire/road noise (CPXI) were conducted along tested surface segments. Texture profiles elaborated on the results of tests using the stylus profilometer and the stationary laser profilometer determined basis for calculation of the mean absolute profile deviations R a and the mean square profile deviations R ms . Relationships between parameters characterizing the road surface texture were established in the tests. A comparative analysis of measurement methods (MPD) using the stylus profilometer and the laser profilometers was performed. The paper presents the texture spectra of tested surfaces in the range of the wavelength from 2 to 250 mm, macrotexture and megatexture as well as for the wavelength 5 and 80 mm.
Stylus
Texture (cosmology)
Road surface
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Citations (8)