Development of a multi-material micropump
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In this paper, the design of a multi-material micropump will be described. The micropump inhibits a very simple design and therefore is very cost efficient. The pump consists of one plastic part, one metal diaphragm, and three piezo lead-zirconate titanate (PZT) ceramics. The PZT ceramics, glued on a metal diaphragm, form two active valves (inlet and outlet valve) and one actuation diaphragm. The valve seats, the pump chamber, and the inlet/outlet interfacing channels are formed in the plastic body. Due to its function principle, the micropump is able to pump bidirectionally. The design of the micropump covers bubble tolerant and self-priming features. Therefore, design measures have been carried out to realize a large compression ratio and to reduce the capillary pressures of bubbles in the pump chamber. The pump is able to handle gases and liquids. The plastic body is made of poly-ether-ether-ketone, and the metal diaphragm is made of stainless steel. Therefore, a good chemical resistance will be given. First prototypes of the actuation unit have been manufactured and tested successfully. Each actuation unit is able to performa stroke ofmore than 40 μm. Furthermore, the plastic body has been realized by milling, and preliminary measurements were carried out. For future work, the development and optimization of an improved micropump using microinjection moulding instead of milling are envisaged.Keywords:
Diaphragm (acoustics)
Diaphragm pump
Abstract A new aluminum based valveless fluid micropump is designed by micromachining method. The pump consists of two fluid diffuser/nozzle elements on each side of a chamber with an oscillating diaphragm which is actuated with a piezoelectric disc. The two simultaneously vibrating diaphragms produce a large oscillating chamber volume. To obtain the optimal structural parameters at the design stage of the pump, the ANSYS finite element software is used for the simulation. The pump prototype with two aluminum diaphragms of ϕ10mm × 0.1mm has been simulated. The chamber oscillating volume can reach as high as 800μl for water pumping.
Diffuser (optics)
Diaphragm (acoustics)
Diaphragm pump
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This paper describes a piezoelectric micropump built on a dome-shaped diaphragm with one-way parylene valves. The micropump uses piezoelectric ZnO film (less than 10 /spl mu/m thick) to actuate a parylene dome diaphragm, which is fabricated with an innovative, IC-compatible process on a silicon substrate. Piezoelectric ZnO film is sputter-deposited on a parylene dome diaphragm with its C-axis oriented perpendicular to the dome surface. Two one-way check valves (made of parylene) are integrated with a piezoelectrically actuated dome diaphragm to form a multi-chip micropump. The fabricated micropump (10/spl times/10/spl times/1.6 mm/sup 3/) consumes extremely low power (i.e., 3 mW to pump 3.2 /spl mu/L/min) and shows negligible leak up to 700 Pa static differential pressure.
Diaphragm (acoustics)
Parylene
Dome (geology)
Diaphragm pump
Molding (decorative)
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In the process of developing high-pressure and largh-flux diaphragm pump,it put forward higher demand of producing high distortion ability and high lifetime rubber diaphragm.This thesis creating the modeling and anlysising the rubber diaphargm of diaphragm pump with finite element analysis sofeware ANSYS,the analyse can establish the base of optimizing structure design.
Diaphragm (acoustics)
Diaphragm pump
Distortion (music)
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Diaphragm pumps are used in turbomolecular pumps to generate a rough vacuum. They are characterized by high suction speed, which however deteriorates when the working pressure decreases. This is caused by the difference between the working pressure of the pump and the ambient pressure. The larger the pressure difference, the more the elastic diaphragm bulges, lowering the effective input volume of the pump. This problem is alleviated by a newly developed diaphragm stabilization system. Diaphragm roughing pumps equipped with this system pump down faster than pumps without the system. Due to the enhanced suction speed, they also ensure greater process reliability. The first application of the diaphragm stabilization system (patent applied for) is in a newly developed diaphragm roughing pump. This pump is driven by a compact, brushless DC motor with very high efficiency. The pump is available in 24 volt DC and 90- to 264 volt, 50/60 Hz AC versions. OEM and portable versions are available.
Diaphragm (acoustics)
Diaphragm pump
Volt
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Diaphragm (acoustics)
Diaphragm pump
Enclosure
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Electrostatic actuation method is commonly employed for MEMS micropump mechanism which consists of diaphragm microstructure and parallel electrode. This work discussed on design and simulation of square silicon diaphragms and it characteristics for micropump application which supply voltage range of 0V-20 V. The characterizations of these diaphragms were based on the measurement on parameters such as diaphragm displacement as function of voltage applied and stress distribution. The simulations were carried out using CoventorWare2007. Results show that simulation deviate theoretical value in a range of below 15%. The displacement of the diaphragm was proportional to the physical geometry of the diaphragm. Pull-in voltage defines the limitation value for micropump operation.
Diaphragm (acoustics)
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A distributing cracked diaphragm autoalarm system was developed for diaphragm pump.In the system,lower computer was used to detect whether the diaphragm in the diaphragm-cavity was broke down,upper computer was used to show the work state plan of the diaphragm,the specific location of the diaphragm breakdown which had a variety of management functions.The system is reliable,low cost,strong features and productivity is improved.
Diaphragm (acoustics)
Diaphragm pump
Realization (probability)
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Abstract In this report we introduce the design and prototype implementation of a bio hybrid pump driven by cardiac muscle tissue to supply other biological actuators in a larger bio hybrid robotic system sufficiently with nutrition media. Recently introduced bio hybrid pumps are analyzed and compared. On this basis a diaphragm pump design is chosen as physical principal and a functional prototype is designed. The derived requirements regarding the flowrates and long-term stability are verified with mechanical tests of the implemented prototype. The pump itself will consist of a body, an actuating membrane (to carry future muscle cells), a cylindrical spacer block, a returning diaphragm and the retaining ring. During operation the flow direction is implemented by two check valves. Our mechanical verification results show a flowrate of 14.2 ml/min with an activation frequency of 1 Hz. For the displacement of the returning diaphragm a required force of 0.58 N is determined. This is well within the capabilities of cardio myocytes which are in the range of 2 to 5 nN/μm2 and therefore could generate 0.63 to 1.57 N given the area of the 40 mm diameter membrane.
Diaphragm (acoustics)
Diaphragm pump
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A numerical analysis has been conducted for flow characteristics and performance of a micropump with piezodisk and MHD(Magnetohydrodynamics) fluid. Various micro systems which could not be considered in the past have been recently growing with the development of MEMS(Micro Electro Mechanical System) and micro machining technology. Especially, micropumps, essential part of micro fluidic devices, are being lively studied by many researchers. In the present study, the piezo electric micropump with electromagnetic resistance for electrically conducting fluids is considered. The prescribed grid deformation method is used for the displacement of the membrane. The change of the performance of the micropump and flow characteristics of the electrically conducting fluid with the magnitude of the magnetic fields, duct size, the position of the inlet and outlet duct are investigated in the present study.
Fluidics
Positive displacement meter
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Diaphragm (acoustics)
Check valve
Diaphragm pump
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