Multilayer Laue Lenses with Focal Length of 10 mm

Multilayer laue lenses are diffractive optics with a high potential for producing X-ray foci in the order of 10 nm or even below. Particularly for hard X-rays (E > 6 keV) these optics promise better resolution and higher efficiencies than currently available Fresnel zone plates. Magnetron sputter deposition has been used for the fabrication of multilayer laue lenses using the layer materials MoSi2 and Si. The lens design has been defined to get focal length in the order of 10 mm. One of the lenses with an aperture of about 20 μm has been used as focusing optics in the nanoprobe beamline P06 at PETRA III. Ptychography has been applied to characterize the caustic of the focused beam and to determine the size of the X-ray focus. A spot size of about 39 nm could be obtained with a photon energy of 21 keV and a focal length of 9.9 mm.