Lα and Mαβ X-ray production cross-sections of Bi by 6–30 keV electron impact

Abstract In this paper, the L α and M αβ X-ray production cross-sections for Bi impacted by 6–30 keV electron have been measured. The experiments were performed at a Scanning Electron Microscope equipped with a silicon drift detector. The thin film with thick C substrate and the thin film deposited on self-supporting thin C film were both used as the targets to make a comparison. For the thick carbon substrate target, the Monte Carlo method has been used to eliminate the contribution of backscattering particles. The measured data are compared with the DWBA theoretical model and the experimental results in the literature. The experimental data for the thin film with thick C substrate target and the thin film deposited on self-supporting thin C film target are within reasonable gaps. The DWBA theoretical model gives good fit to the experimental data both for L- and M- shells. Besides, we also analyze the reasons why the discrepancies exist between our measurements and the experimental results in the literature.