Method of manufacturing zno based thin film for transparent electrode and zno based thin film for transparent electrode by the method

2011 
PURPOSE: A method of manufacturing a ZnO based thin film for a transparent electrode and a ZnO based thin film for a transparent electrode manufactured by the method are provided to obtain a ZnO based thin film with improved conductivity and transmittance in a long wavelength band. CONSTITUTION: A method of manufacturing a ZnO based thin film for a transparent electrode comprises the steps of: forming a ZnO film doped with dopant on a transparent substrate and rapidly heat-treating the ZnO thin film. The ZnO thin film is formed by selected one of pulse laser deposition, sputtering, spray coating, CVD coating, evaporation, and molecular beam epitaxy.
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