Versatile use of ion beams for diffusion studies by the modified radiotracer technique

Abstract In the modified radiotracer technique ion beams within a broad energy range are employed. They include energetic light particles ensuring radioactive isotope production via nuclear reactions, keV-ion implantation of radiotracers and sputtering by low energy heavy ions for depth profiling. If the involved ion–solid interactions are properly taken into account, the technique provides an effective means for solid-state diffusion studies under demanding conditions. The various aspects related to the modified radiotracer technique are surveyed and discussed. The reliability of the procedure is demonstrated by comparisons with corresponding profiles obtained by secondary ion mass spectrometry. Also previously unpublished diffusion data for 71 Ge self-diffusion in relaxed Si 0.87 Ge 0.13 are provided for comparison purposes.