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濺鍍薄膜之光學常數與界面應力; The optical properties and interface stresses of the sputtered dielectric thin films
濺鍍薄膜之光學常數與界面應力; The optical properties and interface stresses of the sputtered dielectric thin films
2011
Kunxian Li
Kun-Hsien Lee
Keywords:
Thin film
Sputtering
Dielectric
Composite material
Materials science
dielectric thin films
Correction
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