Monolayer MoS$_2$ Strained to 1.2\% with a Microelectromechanical System

A method was developed for incorporating two dimensional (2D) materials with MEMS for studying strain physics and creating strain based devices. Our method modified a standard polymer technique for transferring atomically thin materials to be specifically tailored for use with microelectromechanical systems (MEMS). Our method gracefully tolerates the non-planar structures and fragility of MEMS, while still providing precise positioning and crack free transfer of flakes. Further, our method used the transfer polymer to anchor the sample to the MEMS, which reduces the fabrication time, increases the yield, and allowed us to exploit the strong mechanical coupling between sample and polymer to strain the sample. We used our method to strain a single atomic layer of molybdenum disulfide (MoS$_2$) with a MEMS for the first time and achieved greater than 1\% strain. We relied on the strain response of MoS$_2$ Raman and Photoluminescence spectra, which have been established in the literature, to deduce the strain in our sample and provide a consistency check. We found good comparison between our experiment and literature, marking the passage of a major milestone for incorporating 2D materials with MEMS.